INITIAL PROCESS OF CLUSTER FORMATION OF LASER-ABLATEDSiPARTICLES

Takasumi Ohyanagi, Atsumi Miyashita, Kouichi Murakami and Osamu Yoda
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Takasumi Ohyanagi: Institute of Materials Sciences, University of Tsukuba, Tsukuba, Ibaraki 305, Japan
Atsumi Miyashita: Takasaki Research Establishment, Japan Atomic Energy Research Institute, Takasaki, Gunma 370–12, Japan
Kouichi Murakami: Institute of Materials Sciences, University of Tsukuba, Tsukuba, Ibaraki 305, Japan
Osamu Yoda: Takasaki Research Establishment, Japan Atomic Energy Research Institute, Takasaki, Gunma 370–12, Japan

Surface Review and Letters (SRL), 1996, vol. 03, issue 01, 187-190

Abstract: We have performed x-ray absorption measurements of laser-ablatedSiparticles in vacuum and in Hegas environment. It is found that the spatial distributions of laser-ablated particles are very different between the two cases. This suggests that a higher-density region of helium gas is formed at the top of the plume of the ablated particles, and free expansion of particles is restrained by this helium cloud. Moreover, the spectrum obtained at 260 ns indicates that it takes more than 260 ns to formSiclusters. It is also demonstrated that Al particles can be sputtered in vacuum by laser-ablatedSiparticles if an Al plate is placed in front of the plume.

Date: 1996
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DOI: 10.1142/S0218625X96000371

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