ENERGETIC CLUSTER IMPACT (ECI): A NEW METHOD FOR THIN-FILM FORMATION

Hellmut Haberland, Michael Moseler, You Qiang, Oliver Rattunde, Thomas Reiners and Yonca Thurner
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Hellmut Haberland: Freiburger Materialforschungszentrum, Stefan Meierstrasse 21, 79104 Freiburg, Germany
Michael Moseler: Freiburger Materialforschungszentrum, Stefan Meierstrasse 21, 79104 Freiburg, Germany
You Qiang: Freiburger Materialforschungszentrum, Stefan Meierstrasse 21, 79104 Freiburg, Germany
Oliver Rattunde: Freiburger Materialforschungszentrum, Stefan Meierstrasse 21, 79104 Freiburg, Germany
Thomas Reiners: Freiburger Materialforschungszentrum, Stefan Meierstrasse 21, 79104 Freiburg, Germany
Yonca Thurner: Freiburger Materialforschungszentrum, Stefan Meierstrasse 21, 79104 Freiburg, Germany

Surface Review and Letters (SRL), 1996, vol. 03, issue 01, 887-890

Abstract: A completely ionized beam of metal clusters is deposited with variable kinetic energy on a substrate. Mirror-like and strongly adhering films having unusual properties are produced for sufficiently high cluster impact energies. Numerical simulations provide the physical insight why this novel technique gives different, and sometimes superior results compared to conventional methods. Several examples are presented.

Date: 1996
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DOI: 10.1142/S0218625X96001595

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