FUNDAMENTAL ASPECTS OF THE IONIZED CLUSTER-BEAM DEPOSITION PROCESS

G.H. Takaoka, J. Matsuo, C.E. Ascheron and I. Yamada
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G.H. Takaoka: Ion Beam Engineering Experimental Laboratory, Kyoto University, Sakyo, Kyoto 606–01, Japan
J. Matsuo: Ion Beam Engineering Experimental Laboratory, Kyoto University, Sakyo, Kyoto 606–01, Japan
C.E. Ascheron: Ion Beam Engineering Experimental Laboratory, Kyoto University, Sakyo, Kyoto 606–01, Japan
I. Yamada: Ion Beam Engineering Experimental Laboratory, Kyoto University, Sakyo, Kyoto 606–01, Japan

Surface Review and Letters (SRL), 1996, vol. 03, issue 01, 1013-1016

Abstract: The electron diffraction measurement of Sb beams ejected by adiabatic expansion from a nozzle source showed that a considerable amount of clusters with a highly disordered atomic arrangement was produced. The cluster size was found to be larger than a few tens of atoms per cluster, though the exact size could not be determined. It was reported that after impact of clusters ejected from the nozzle source, cluster islands were formed on a substrate surface, and that the film formation started by direct deposition of clusters as the rapid nucleation of cluster islands. These results supported the notion that large atomic clusters existed in the beam.

Date: 1996
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DOI: 10.1142/S0218625X96001819

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