X-RAY SPECTROSCOPIC ANALYSIS OF BORON-NITRIDE CLUSTERS DEPOSITED BY ION-PLATING METHOD

H. Kohzuki, M. Motoyama, T. Kaneyoshi, Y. Kowada, J. Kawai and H. Adachi
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H. Kohzuki: Hyogo Prefectural Institute of Industrial Research, 240–1, Hirata, Miki-shi, Hyogo 673–04, Japan
M. Motoyama: Hyogo Prefectural Institute of Industrial Research, 3–1–12 Yukihira-cho, Suma-ku, Kobe-shi, Hyogo 654, Japan
T. Kaneyoshi: Hyogo Prefectural Institute of Industrial Research, 3–1–12 Yukihira-cho, Suma-ku, Kobe-shi, Hyogo 654, Japan
Y. Kowada: Hyogo University of Teacher Education, 942–1 Shimokume, Yashiro-cho, Kato-gun, Hyogo 673–14, Japan
J. Kawai: Department of Metallurgy, Kyoto University, Yoshida-honmachi, Sakyo-ku, Kyoto-shi, Kyoto 606, Japan
H. Adachi: Department of Metallurgy, Kyoto University, Yoshida-honmachi, Sakyo-ku, Kyoto-shi, Kyoto 606, Japan

Surface Review and Letters (SRL), 1996, vol. 03, issue 01, 1051-1057

Abstract: Cubic boron-nitride (c-BN) films were deposited on a silicon substrate by varying the deposition time, using a reactive ion-plating method. In order to investigate the growth mechanism of c-BN films, these c-BN films were characterized by x-ray emission spectra of boron (B K x-ray emission spectra), infrared absorption spectra, selected area diffraction patterns, and TEM microstructures. It was found that the BN film withsp2bonding formed initially on the substrate and subsequently c-BN film formed. The c-BN film was composed of fine crystallites with a size of about 10 nm and with random orientation. In the case of the B K x-ray emission spectrum from the BN film withsp2bonding, the intensity of the satellite peak at the short-wavelength side was extremely stronger than that ofsp2-bonded BN-like turbostratic or hexagonal BN. As a result of calculation of the B K x-ray emission spectrum of BN using the discrete variational Hartree-Fock-Slater (DV-Xα) method, it was found that the satellite peak intensity increased with formation of the fine BN cluster having two-coordinated boron (which has a dangling bond) and with decreasing size of the cluster. Therefore, it is considered that the BN film withsp2bonding was composed of the very fine BN cluster having two-coordinated borons, and became the precursor of c-BN film at the interface between the substrate and c-BN film.

Date: 1996
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DOI: 10.1142/S0218625X96001881

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