SIZE AND SHAPE MANIPULATION OF SILVER AND INDIUM SMALL PARTICLES BY ELECTRON-BEAM IRRADIATION

A. Heilmann, A.-D. Müller and J. Werner
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A. Heilmann: Technical University Chemnitz-Zwickau; Institute of Physics, 09107 Chemnitz, Germany
A.-D. Müller: Technical University Chemnitz-Zwickau; Institute of Physics, 09107 Chemnitz, Germany
J. Werner: Technical University Chemnitz-Zwickau; Institute of Physics, 09107 Chemnitz, Germany

Surface Review and Letters (SRL), 1996, vol. 03, issue 01, 1113-1119

Abstract: Small particles of indium or silver were encapsulated in a thin polymer film matrix by simultaneous plasma polymerization and metal evaporation. Electron-beam irradiation inside transmission electron microscopes and with a microfocus electron source was used to induce changes of the encapsulated particle size and shape. At encapsulated indium particles, substantial microstructural changes were observed during the electron-beam irradiation in the electron microscope. Selected area diffraction demonstrates that indium oxide was formed during the electron irradiation. Additional in situ annealing demonstrates that the indium melting point was not reached during electron-beam-induced local heating of the indium particles. At electron-beam irradiation of plasma polymer films with encapsulated silver particles by using a microfocus electron source, the coalescence of the silver particles can be limited to the irradiated areas of the films.

Date: 1996
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DOI: 10.1142/S0218625X96001996

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