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ELECTRON TRANSPORT PROPERTIES IN FINE-PARTICLE FILMS OF Au EVAPORATED ONTO Si NATIVE OXIDE: THERMAL ANNEALING EFFECTS

Hiroyuki Kasahara, T. Shikata and K. Yamamoto
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T. Shikata: Department of Electric & Electronics Engineering, Kobe University, Rokko, Nada, Kobe 657, Japan
K. Yamamoto: Department of Electric & Electronics Engineering, Kobe University, Rokko, Nada, Kobe 657, Japan

Surface Review and Letters (SRL), 1996, vol. 03, issue 01, 1133-1136

Abstract: We investigated electron transport in fine-particle films of Au prepared onto Si native oxide. Electron transport measurements and TEM observations were carried out for as-deposited and after thermal treatment of the films in air. We observed the anomalous resistance increases in as-deposited fine-particle films of Au and obtainedαT=4.5. After 150°C thermal treatment in air, however, these anomalous resistance increases in the Au films disappeared and its topography appeared on the TEM images drastically changed into percolative structure. We found that the size of the Au fine particles causes anomalous resistance increase at low temperature.

Date: 1996
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DOI: 10.1142/S0218625X96002023

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