CRITICAL GRAIN SIZE FOR STRUCTURAL TRANSFORMATION IN VACUUM-DEPOSITED MOLYBDENUM FILMS

T. Kizuka, T. Sakamoto, T. Hayashi and N. Tanaka
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T. Kizuka: Department of Applied Physics, School of Engineering, Nagoya University, Furo-cho, Chikusa-ku, Nagoya 464–01, Japan
T. Sakamoto: Department of Applied Physics, School of Engineering, Nagoya University, Furo-cho, Chikusa-ku, Nagoya 464–01, Japan
T. Hayashi: Department of Applied Physics, School of Engineering, Nagoya University, Furo-cho, Chikusa-ku, Nagoya 464–01, Japan;
N. Tanaka: Department of Applied Physics, School of Engineering, Nagoya University, Furo-cho, Chikusa-ku, Nagoya 464–01, Japan

Surface Review and Letters (SRL), 1996, vol. 03, issue 01, 1181-1185

Abstract: Nanometer-grained polycrystalline films were prepared by vacuum deposition of molybdenum (Mo) by using electron-beam heating. The structure and composition of the grains were analyzed by high-resolution electron microscopy and Auger electron spectroscopy, respectively. The concentration of carbon in the films was measured in relation to reduction of the grain size to nanometer scale. The grains had a bcc structure when the grain size was larger than 4 nm. On the other hand, the grains smaller than 4 nm for films had a fcc structure. Large amount of carbon was included in the grains with the fcc structure in comparison with the grains of bcc structure, although amount of other impurities such as nitrogen and oxygen was similar in both grains. It was found that the structure was transformed from bcc to fcc below the critical grain size, 4 nm, and the grains with the fcc structure were cubic Mo-C.

Date: 1996
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DOI: 10.1142/S0218625X96002126

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