MICROPROBE RHEED/STM COMBINED MICROSCOPY

M. Ichikawa, S. Maruno, S. Fujita, H. Watanabe and Y. Kusumi
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M. Ichikawa: Joint Research Center for Atom Technology, Angstrom Technology Partnership, 1-1-4 Higashi, Tsukuba, Ibaraki 305, Japan
S. Maruno: Joint Research Center for Atom Technology, Angstrom Technology Partnership, 1-1-4 Higashi, Tsukuba, Ibaraki 305, Japan
S. Fujita: Joint Research Center for Atom Technology, Angstrom Technology Partnership, 1-1-4 Higashi, Tsukuba, Ibaraki 305, Japan
H. Watanabe: Joint Research Center for Atom Technology, Angstrom Technology Partnership, 1-1-4 Higashi, Tsukuba, Ibaraki 305, Japan
Y. Kusumi: Joint Research Center for Atom Technology, Angstrom Technology Partnership, 1-1-4 Higashi, Tsukuba, Ibaraki 305, Japan

Surface Review and Letters (SRL), 1997, vol. 04, issue 03, 535-542

Abstract: We have developed microprobe reflection high energy electron diffraction combined with scanning tunneling microscope and molecular beam epitaxy equipment. This combination makes it possible to study and control surface processes in the magnification range from several hundred micrometers to the atomic scale. An electron biprism is also attached to the incident electron beam path, which produces a new kind of scanning electron microscopy called scanning interference electron microscopy. The two coherently divided electron beams created by the biprism produce electron interference fringes. The electron interference fringes are used to form ultrafine periodic structures by electron-stimulated surface reaction and to characterize electromagnetic properties of the surfaces. The formation of periodic carbon grid lines produced by the interference fringes on aGaAssurface and the study ofGethin film growth on a partiallyGaadsorbedSi(111)surface are described for application examples of the microscopy.

Date: 1997
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DOI: 10.1142/S0218625X97000511

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