REM STUDY OF THESi(111)VICINAL SURFACES

T. Suzuki and K. Yagi
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T. Suzuki: Physics Department, Tokyo Institute of Technology, Oh-okayama, Meguro, Tokyo 152, Japan
K. Yagi: Physics Department, Tokyo Institute of Technology, Oh-okayama, Meguro, Tokyo 152, Japan

Surface Review and Letters (SRL), 1997, vol. 04, issue 03, 543-549

Abstract: In this paper, reflection electron microscope (REM) studies of surfaces are briefly reviewed and recent REM studies ofSi(111)vicinal surfaces are described. Triple-layer-height steps are formed on the vicinal surfaces inclined by angles of about 1.5–5° toward the$[\bar{1}\bar{1}2]$direction. The triple steps are seen below the phase transition temperature between the7× 7and1× 1structures and break into single steps above the phase transition temperature. Vicinal surfaces inclined toward the$[11\bar{2}]$direction showed a so-called hill-and-valley structure that is composed of the (111) and an unindexed surface terraces below the phase transition temperature. The hill-and-valley structure disappeared above the phase transition temperature.

Date: 1997
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DOI: 10.1142/S0218625X97000523

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