MONTE-CARLO SIMULATION OF MBE GROWTH OFGaAsANALYSIS OF RHEED

P. J. van Hall, H. Kökten, M. R. Leys and M. Bosch
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P. J. van Hall: Physics Department, Eindhoven University of Technology, Eindhoven, The Netherlands
H. Kökten: Physics Department, Middle East Technical University, Ankara, Turkey
M. R. Leys: Physics Department, Eindhoven University of Technology, Eindhoven, The Netherlands
M. Bosch: Physics Department, Eindhoven University of Technology, Eindhoven, The Netherlands

Surface Review and Letters (SRL), 1997, vol. 04, issue 05, 869-872

Abstract: We have performed Monte-Carlo simulations of the growth of GaAs by MBE. We included in our calculations the anisotropy of the migration, the formation of As-and a partial desorption of the As. As an observable we calculated the RHEED signal of the specularly reflected electrons. The results have been compared with experimental data comprising both the damping of the oscillations and the recovery following a growth interrupt. The agreement between experiment and calculations is rather good. Moreover we could identify the mechanisms underlying the fast and the slow component of the recovery.

Date: 1997
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DOI: 10.1142/S0218625X97000948

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