MODULATED ELECTRON EMISSION

Sergio Valeri
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Sergio Valeri: Istituto Nazionale di Fisica della Materia and Dipartimento di Fisica, Università di Modena, via Campi 213/A, 41100-Modena, Italy

Surface Review and Letters (SRL), 1997, vol. 04, issue 05, 937-945

Abstract: Basic aspects of energetic electron–atom scattering suffered by incident (primary) and/or excident (Auger, backscattered) electrons during propagation in (at least locally) ordered solids are reviewed. Scattering interference results in the dependence of total or partial electron yield on the incidence and/or takeoff angle. This paper is focused on processes experienced by incident electrons. The incident wave amplitude is spatially modulated within the solid by the interference of the unscattered wave portion and the wave portion scattered at the atomic sites. Interplay between forward focusing and multiple-scattering induced defocusing processes determines the profile of the primary electron intensity anisotropy along atomic chains. This anisotropy profile has been found to be a key parameter to interpret and to model modulated electron emission results. Examples are shown. They include (i) structural characterization of multilayer epitaxial growth, and (ii) study of the very early stage of III–V semiconductors amorphyzation by ion bombardment.

Date: 1997
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DOI: 10.1142/S0218625X97001085

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