X-Ray Characterization of Buried δ Layers

J. Falta (), D. Bahr, G. Materlik, B. H. Müller and M. Horn- Von Hoegen
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J. Falta: Hamburger Synchrotronstrahlungslabor HASYLAB am Deutschen, Elektronen-Synchrotron (DESY), Notkestrasse 85, D-22607 Hamburg, Germany
D. Bahr: Hamburger Synchrotronstrahlungslabor HASYLAB am Deutschen, Elektronen-Synchrotron (DESY), Notkestrasse 85, D-22607 Hamburg, Germany
G. Materlik: Hamburger Synchrotronstrahlungslabor HASYLAB am Deutschen, Elektronen-Synchrotron (DESY), Notkestrasse 85, D-22607 Hamburg, Germany
B. H. Müller: Institut für Festkörperphysik, Universität Hannover, Appelstr. 2, 30167 Hannover, Germany
M. Horn- Von Hoegen: Institut für Festkörperphysik, Universität Hannover, Appelstr. 2, 30167 Hannover, Germany

Surface Review and Letters (SRL), 1998, vol. 05, issue 01, 145-149

Abstract: A combination of measurements of crystal truncation roda and X-ray standing waves has been used for a detailed characterization of buried Ge δ layers on Si(001). Measurements of crystal truncation rods reveal the interface roughness, the δ layer lattice constant and the δ layer concentration. From measurements with X-ray standing waves the dopant lattice position and crystallinity of the δ layer are determined. We find a linear dependence of the local tetragonal distortion of the Ge bonding in the δ layer on the Ge concentration in the layer.

Date: 1998
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DOI: 10.1142/S0218625X98000281

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