Development of a Low Energy Electron Microscope with an Energy Analyzer

Y. Sakai, M. Kato, S. Masuda, Y. Harada and T. Ichinokawa
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Y. Sakai: JEOL LTD, 3-1-2 Musashino, Akishima, Tokyo 196-8558, Japan
M. Kato: JEOL LTD, 3-1-2 Musashino, Akishima, Tokyo 196-8558, Japan
S. Masuda: Department of Chemistry, College of Art and Science, The University of Tokyo, Komaba, Meguro-ku, Tokyo 153-0041, Japan
Y. Harada: Department of Material Science, Faculty of Engineering, Chiba University, Yayoi-cho, Inage-ku, Chiba 263-0022, Japan
T. Ichinokawa: Department of Applied Physics, Waseda University, 3-4-1 Ohkubo, Shinjuku-ku, Tokyo 169-0072, Japan

Surface Review and Letters (SRL), 1998, vol. 05, issue 06, 1199-1211

Abstract: A low energy electron microscope (LEEM) with an energy analyzer of the Wien filter type was constructed for surface microanalyses and imaging by irradiating the specimen surface with several types of incident beams, e.g. low energy electrons, UV photons or metastableHe*atoms. A retarding type Wien filter was used for the formation of electron energy filtered images and energy spectra of selected microareas by employing energy loss electron and Auger electron, photoelectron or Penning ionization spectroscopy. Several new designs and performances have been implemented in this instrument and are presented together with some applications.

Date: 1998
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DOI: 10.1142/S0218625X98001535

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