SMART: An Aberration-Corrected XPEEM/LEEM with Energy Filter

R. Wichtendahl, R. Fink (), H. Kuhlenbeck, D. Preikszas, H. Rose, R. Spehr, P. Hartel, W. Engel, R. Schlögl, H.-J. Freund, A. M. Bradshaw, G. Lilienkamp, Th. Schmidt, E. Bauer, G. Benner and E. Umbach
Additional contact information
R. Wichtendahl: Fritz-Haber-Insitut der Max-Planck-Gesellschaft, Faradayweg 4-6, D-14195 Berlin, Germany
R. Fink: Universität Würzburg, Experimentelle Physik II, Am Hubland, D-97074 Würzburg, Germany
H. Kuhlenbeck: Fritz-Haber-Insitut der Max-Planck-Gesellschaft, Faradayweg 4-6, D-14195 Berlin, Germany
D. Preikszas: Technische Hochschule Darmstadt, Angewandte Physik, Hochschulstr. 6, D-64289 Darmstadt, Germany
H. Rose: Technische Hochschule Darmstadt, Angewandte Physik, Hochschulstr. 6, D-64289 Darmstadt, Germany
R. Spehr: Technische Hochschule Darmstadt, Angewandte Physik, Hochschulstr. 6, D-64289 Darmstadt, Germany
P. Hartel: Technische Hochschule Darmstadt, Angewandte Physik, Hochschulstr. 6, D-64289 Darmstadt, Germany
W. Engel: Fritz-Haber-Insitut der Max-Planck-Gesellschaft, Faradayweg 4-6, D-14195 Berlin, Germany
R. Schlögl: Fritz-Haber-Insitut der Max-Planck-Gesellschaft, Faradayweg 4-6, D-14195 Berlin, Germany
H.-J. Freund: Fritz-Haber-Insitut der Max-Planck-Gesellschaft, Faradayweg 4-6, D-14195 Berlin, Germany
A. M. Bradshaw: Fritz-Haber-Insitut der Max-Planck-Gesellschaft, Faradayweg 4-6, D-14195 Berlin, Germany
G. Lilienkamp: Arizona State University, Department of Physics and Astronomy, Tempe, AZ85287-1504, USA
Th. Schmidt: Arizona State University, Department of Physics and Astronomy, Tempe, AZ85287-1504, USA
E. Bauer: Technische Universität Clausthal, Leibnizstr. 4, D-38678 Clausthal-Zellerfeld, Germany;
G. Benner: LEO Elektronenmikroskopie GmbH, D-73446 Oberkochen, Germany
E. Umbach: Universität Würzburg, Experimentelle Physik II, Am Hubland, D-97074 Würzburg, Germany

Surface Review and Letters (SRL), 1998, vol. 05, issue 06, 1249-1256

Abstract: A new UHV spectroscopic X-ray photoelectron emission and low energy electron microscope is presently under construction for the installation at the PM-6 soft X-ray undulator beamline at BESSY II. Using a combination of a sophisticated magnetic beam splitter and an electrostatic tetrode mirror, the spherical and chromatic aberrations of the objective lens are corrected and thus the lateral resolution and sensitivity of the instrument improved. In addition a corrected imaging energy filter (a so-called omega filter) allows high spectral resolution(ΔE=0.1eV)in the photoemission modes and back-ground suppression in LEEM and small-spot LEED modes. The theoretical prediction for the lateral resolution is 5 Å; a realistic goal is about 2 nm. Thus, a variety of electron spectroscopies (XAS, XPS, UPS, XAES) and electron diffraction (LEED, LEEM) or reflection techniques (MEM) will be available with spatial resolution unreached so far.

Date: 1998
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DOI: 10.1142/S0218625X98001584

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