IONIZATION AND EXCITATION PROCESSES IN SPUTTERING IN THE LIGHT OF THE EXPERIMENTAL EVIDENCE

Zdeněk Šroubek and Jan Lörinčík
Additional contact information
Zdeněk Šroubek: Institute of Radio Engineering and Electronics, Academy of Sciences of the Czech Republic, Chaberská 57, 18251 Prague, Republic of Czech
Jan Lörinčík: J. Heyrovsky Institute of Physical Chemistry, Academy of Sciences of the Czech Republic, Dolejškova 3, 18223 Prague, Republic of Czech

Surface Review and Letters (SRL), 1999, vol. 06, issue 02, 257-264

Abstract: So far only one type of theoretical approach for the description of ion formation during sputtering of solids has been developed in detail: the nonadiabatic approach, which uses an unperturbed solid state substrate and which is characterized by the exponential dependence of the ionization probability on the inverse velocity of the sputtered particle. For example, the well-established electron tunneling model belongs to this group of ionization theories. It turns out, however, that the nonadiabatic theories cannot fully explain many experimental observations on ion formation in sputtering. In order to interpret these experiments the assumption of an electronically unexcited substrate must be dropped and a generalizing concept of localization of electronic excitations around the emission spot must be taken into account. Typical consequences of this more general approach are a weaker dependence of the ionization probability on the emission velocity (compared to the nonadiabatic theories) and the dependence of the ionization probability on bombarding conditions. To document the idea several characteristic experiments are presented in this paper and are interpreted within the concept of excitation localization.

Date: 1999
References: Add references at CitEc
Citations:

Downloads: (external link)
http://www.worldscientific.com/doi/abs/10.1142/S0218625X99000275
Access to full text is restricted to subscribers

Related works:
This item may be available elsewhere in EconPapers: Search for items with the same title.

Export reference: BibTeX RIS (EndNote, ProCite, RefMan) HTML/Text

Persistent link: https://EconPapers.repec.org/RePEc:wsi:srlxxx:v:06:y:1999:i:02:n:s0218625x99000275

Ordering information: This journal article can be ordered from

DOI: 10.1142/S0218625X99000275

Access Statistics for this article

Surface Review and Letters (SRL) is currently edited by S Y Tong

More articles in Surface Review and Letters (SRL) from World Scientific Publishing Co. Pte. Ltd.
Bibliographic data for series maintained by Tai Tone Lim ().