FABRICATION OF BIMETALLIC CANTILEVERS AND ITS CHARACTERIZATION

Mi-Young Jung, S. S. Choi (), C. J. Kang and Y. Kuk
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Mi-Young Jung: Department of Physics, Sun-Moon University, Ahsan, Chung Nam, 336-840, Korea
S. S. Choi: Department of Physics, Sun-Moon University, Ahsan, Chung Nam, 336-840, Korea
C. J. Kang: Department of Physics, Seoul National University, Seoul, Korea
Y. Kuk: Department of Physics, Seoul National University, Seoul, Korea

Surface Review and Letters (SRL), 1999, vol. 06, issue 06, 1195-1199

Abstract: Most SPM sensors utilize a current-imaging technique or force-imaging techniques that allow imaging nanoscale topography of the surface using a nanoscale tip on cantilever. In this work, the various cantilevers were microfabricated with aSiO2thin film or aSi3N4thin film. Thermal imaging technique using microfabricatedSi3N4cantilevers has been investigated. The temperature change and heat flow across the fabricated bimetallic cantilever will create angular bending of the bimetallic metal-coated lever. Its thermal response was qualitatively examined during an endothermic chemical reaction using optical deflection methods. The chemical used in this experiment is the tetradecanolCH3(CH2)13OH, with a known theoretical phase transition temperature of~ 313K.

Date: 1999
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DOI: 10.1142/S0218625X99001335

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