MICRO-FOUR-POINT PROBES IN A UHV SCANNING ELECTRON MICROSCOPE FORIN-SITUSURFACE-CONDUCTIVITY MEASUREMENTS

Ichiro Shiraki, Tadaaki Nagao, Shuji Hasegawa (), Christian L. Petersen, Peter Bøggild, Torben M. Hansen and François Hansen
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Ichiro Shiraki: Department of Physics, School of Science, University of Tokyo 7-3-1 Hongo, Bunkyo-ku, Tokyo, 113-0033, Japan
Tadaaki Nagao: Department of Physics, School of Science, University of Tokyo 7-3-1 Hongo, Bunkyo-ku, Tokyo, 113-0033, Japan;
Shuji Hasegawa: Department of Physics, School of Science, University of Tokyo 7-3-1 Hongo, Bunkyo-ku, Tokyo, 113-0033, Japan;
Christian L. Petersen: Mikroelektronik Centret (MIC), Technical University of Denmark, Bldg. 345 east, DK-2800, Lyngby, Denmark
Peter Bøggild: Mikroelektronik Centret (MIC), Technical University of Denmark, Bldg. 345 east, DK-2800, Lyngby, Denmark
Torben M. Hansen: Mikroelektronik Centret (MIC), Technical University of Denmark, Bldg. 345 east, DK-2800, Lyngby, Denmark
François Hansen: Mikroelektronik Centret (MIC), Technical University of Denmark, Bldg. 345 east, DK-2800, Lyngby, Denmark

Surface Review and Letters (SRL), 2000, vol. 07, issue 05n06, 533-537

Abstract: Forin-situmeasurements of surface conductivity in ultrahigh vacuum (UHV), we have installed micro-four-point probes (probe spacings down to 4 μm) in a UHV scanning electron microscope (SEM) combined with scanning reflection–high-energy electron diffraction (RHEED). With the aid of piezoactuators for precise positioning of the probes, local conductivity of selected surface domains of well-defined superstructures could be measured during SEM and RHEED observations. It was found that the surface sensitivity of the conductivity measurements was enhanced by reducing the probe spacing, enabling the unambiguous detection of surface-state conductivity and the influence of surface defects on the electrical conduction.

Keywords: No available; 73.25.+i; 61.16.Di; 68.35.-p (search for similar items in EconPapers)
Date: 2000
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DOI: 10.1142/S0218625X00000592

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