EconPapers    
Economics at your fingertips  
 

SiTWINNING SUPERLATTICE: GROWTH OF NEW SINGLE CRYSTALSi

H. Hibino and T. Ogino
Additional contact information
H. Hibino: NTT Basic Research Laboratories, Atsugi, Kanagawa 243-0198, Japan
T. Ogino: NTT Basic Research Laboratories, Atsugi, Kanagawa 243-0198, Japan

Surface Review and Letters (SRL), 2000, vol. 07, issue 05n06, 631-635

Abstract: Si twinning superlattices are grown on${\rm Si}(111)(\sqrt3\times\sqrt3)\mbox{-}{\rm B}$by the repeated growth of Si layers with a unit thickness and postgrowth annealing. In order to determine the growth conditions of the Si twinning superlattice, it is essential to measure the crystallographic orientations in the surface regions during growth. Reflection high-energy electron diffraction (RHEED) is very sensitive to the surface orientation. Using the technique to estimate the fraction of the twinned layers in the grown layers by RHEED, we investigate the growth process and thermal stability of the twinned epitaxial layers. The growth of the twinning superlattices is monitored by the oscillation of the twinned layer fraction as a function of the thickness.

Date: 2000
References: Add references at CitEc
Citations:

Downloads: (external link)
http://www.worldscientific.com/doi/abs/10.1142/S0218625X00000609
Access to full text is restricted to subscribers

Related works:
This item may be available elsewhere in EconPapers: Search for items with the same title.

Export reference: BibTeX RIS (EndNote, ProCite, RefMan) HTML/Text

Persistent link: https://EconPapers.repec.org/RePEc:wsi:srlxxx:v:07:y:2000:i:05n06:n:s0218625x00000609

Ordering information: This journal article can be ordered from

DOI: 10.1142/S0218625X00000609

Access Statistics for this article

Surface Review and Letters (SRL) is currently edited by S Y Tong

More articles in Surface Review and Letters (SRL) from World Scientific Publishing Co. Pte. Ltd.
Bibliographic data for series maintained by Tai Tone Lim ().

 
Page updated 2025-03-20
Handle: RePEc:wsi:srlxxx:v:07:y:2000:i:05n06:n:s0218625x00000609