PLASMA DAMAGE IN METHANE–HYDROGEN REACTIVE ION ETCHEDGaAs

S. O. Saied and J. L. Sullivan
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S. O. Saied: School of Engineering and Applied Science, Aston University, Aston Triangle, Birmingham, B4 7ET, UK
J. L. Sullivan: School of Engineering and Applied Science, Aston University, Aston Triangle, Birmingham, B4 7ET, UK

Surface Review and Letters (SRL), 2001, vol. 08, issue 05, 501-504

Abstract: No abstract received.

Date: 2001
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DOI: 10.1142/S0218625X01001324

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