INVESTIGATION OF THE DEGRADATION MECHANISM OF FIELD-EMITTER ARRAYS

Jing Yuan, Li de-Jie and Bing-Chu Du
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Jing Yuan: Department of Electronic Engineering, Tsinghua University, Beijing 100084, China
Li de-Jie: Department of Electronic Engineering, Tsinghua University, Beijing 100084, China
Bing-Chu Du: Department of Electronic Engineering, Tsinghua University, Beijing 100084, China

Surface Review and Letters (SRL), 2001, vol. 08, issue 06, 699-702

Abstract: There are three primary explanations for the degradation mechanism of field-emitter arrays (FEA's): oxidation, sputtering damage and ion implantation. Theoretical analysis and calculation are carried out in this paper to investigate the issue deeply. Adsorption and oxidation of FEA's fit best the experimental phenomenon and are the most reasonable causes for it. The process of adsorption and oxidation is described and directions for further experiments are suggested.

Date: 2001
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DOI: 10.1142/S0218625X01001658

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