ZONE-PLATE-BASED SCANNING PHOTOELECTRON MICROSCOPY AT SRRC: PERFORMANCE AND APPLICATIONS

Ruth Klauser (), I.-H. Hong, T.-H. Lee, G.-C. Yin, D.-H. Wei, K.-L. Tsang, T. J. Chuang, S.-C. Wang, S. Gwo, Michael Zharnikov and J.-D. Liao
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Ruth Klauser: Synchrotron Radiation Research Center, No.7 1 R&D Road VI, Hsinchu 300, Taiwan, R.O.C
I.-H. Hong: Synchrotron Radiation Research Center, No.7 1 R&D Road VI, Hsinchu 300, Taiwan, R.O.C
T.-H. Lee: Synchrotron Radiation Research Center, No.7 1 R&D Road VI, Hsinchu 300, Taiwan, R.O.C
G.-C. Yin: Synchrotron Radiation Research Center, No.7 1 R&D Road VI, Hsinchu 300, Taiwan, R.O.C
D.-H. Wei: Synchrotron Radiation Research Center, No.7 1 R&D Road VI, Hsinchu 300, Taiwan, R.O.C
K.-L. Tsang: Synchrotron Radiation Research Center, No.7 1 R&D Road VI, Hsinchu 300, Taiwan, R.O.C
T. J. Chuang: Center for Condensed Matter Sciences, National Taiwan University, Taipei 106, Taiwan, R.O.C;
S.-C. Wang: Institute of Atomic and Molecular Sciences, Academia Sinica, Taipei 106, Taiwan, R.O.C
S. Gwo: Department of Physics, National Tsing-Hua University, Hsinchu 300, Taiwan, R.O.C
Michael Zharnikov: Angewandte Physikalische Chemie, Universität Heidelberg, Im Neuenheimer Feld 253, D-69120 Heidelberg, Germany
J.-D. Liao: Department of Biomedical Engineering, Chung Yuan Christian University, Chung-Li, Taoyuan 32023, Taiwan, R.O.C

Surface Review and Letters (SRL), 2002, vol. 09, issue 01, 213-222

Abstract: Adapting classical spectroscopic methods to the new challenge of studying nanomaterials, imaging techniques are the trendsetter in recent years. Among them is scanning photoelectron microscopy (SPEM) with submicron spatial resolution, where the sample surface is raster-scanned by a focused soft X-ray beam, and the emitted photoelectrons are collected at each point by the input optics of an electron energy analyzer. We have constructed such a station at SRRC in Taiwan, which is now fully in operation. In this paper, we introduce the specific features of the instrument and discuss application examples on the characterization of scanning-probe-inducedSi3N4toSiOxconversion and electron- and plasma-induced chemical changes in alkanethiols self-assembled monolayers. In combining two-dimensional imaging and micro-photoemission, SPEM can reveal valuable information on the chemical and electronic properties of structured and multiphase materials.

Date: 2002
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DOI: 10.1142/S0218625X0200180X

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