DEPTH-RESOLVED SOFT X-RAY EMISSION SPECTROSCOPY OF Si-BASED MATERIALS

A. V. Zimina, A. S. Shulakov, S. Eisebitt and W. Eberhardt
Additional contact information
A. V. Zimina: Institute of Physics, Saint-Petersburg State University, Ulianovskaya str. 1, 198904, Saint-Petersburg, Russia
A. S. Shulakov: Institute of Physics, Saint-Petersburg State University, Ulianovskaya str. 1, 198904, Saint-Petersburg, Russia
S. Eisebitt: IFF, Forschungszentrum Juelich, D-52425, Juelich, Germany
W. Eberhardt: IFF, Forschungszentrum Juelich, D-52425, Juelich, Germany

Surface Review and Letters (SRL), 2002, vol. 09, issue 01, 461-467

Abstract: We discuss a soft X-ray emission (SXE) valence band (VB) spectroscopy method for the study of the electronic structure and chemical phase composition of solids in a near-surface region with depth resolution. The depth information is obtained by variation of the energy of the incident electron beam used to excite the SXE spectra. As the information depth can be varied from about 1 nm to 1 μm in silicon, this method is suitable for the investigation of materials of modern micro- and nanoelectronics. VB → core level (Si 2p or Al 2p) transitions in Si-based materials are used to demonstrate the technique. It was found that the contribution of the signal from the near-surface region (

Date: 2002
References: Add references at CitEc
Citations:

Downloads: (external link)
http://www.worldscientific.com/doi/abs/10.1142/S0218625X02002464
Access to full text is restricted to subscribers

Related works:
This item may be available elsewhere in EconPapers: Search for items with the same title.

Export reference: BibTeX RIS (EndNote, ProCite, RefMan) HTML/Text

Persistent link: https://EconPapers.repec.org/RePEc:wsi:srlxxx:v:09:y:2002:i:01:n:s0218625x02002464

Ordering information: This journal article can be ordered from

DOI: 10.1142/S0218625X02002464

Access Statistics for this article

Surface Review and Letters (SRL) is currently edited by S Y Tong

More articles in Surface Review and Letters (SRL) from World Scientific Publishing Co. Pte. Ltd.
Bibliographic data for series maintained by Tai Tone Lim ().