DEVELOPMENT OF SUPERCONDUCTING TUNNEL JUNCTIONS FOR EUV DETECTORS

Y. Takizawa, T. Ikeda, T. Oku, C. Otani, K. Kawai, H. Sato, H. M. Shimizu, H. Mikami, H. Miyasaka and H. Watanabe
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Y. Takizawa: Division of Image Information, RIKEN, 2-1 Hirosawa, Wako-shi, Saitama 351-0198, Japan
T. Ikeda: Division of Image Information, RIKEN, 2-1 Hirosawa, Wako-shi, Saitama 351-0198, Japan
T. Oku: Division of Image Information, RIKEN, 2-1 Hirosawa, Wako-shi, Saitama 351-0198, Japan
C. Otani: Division of Image Information, RIKEN, 2-1 Hirosawa, Wako-shi, Saitama 351-0198, Japan
K. Kawai: Division of Image Information, RIKEN, 2-1 Hirosawa, Wako-shi, Saitama 351-0198, Japan
H. Sato: Division of Image Information, RIKEN, 2-1 Hirosawa, Wako-shi, Saitama 351-0198, Japan
H. M. Shimizu: Division of Image Information, RIKEN, 2-1 Hirosawa, Wako-shi, Saitama 351-0198, Japan
H. Mikami: Division of Image Information, RIKEN, 2-1 Hirosawa, Wako-shi, Saitama 351-0198, Japan
H. Miyasaka: Division of Image Information, RIKEN, 2-1 Hirosawa, Wako-shi, Saitama 351-0198, Japan
H. Watanabe: Division of Image Information, RIKEN, 2-1 Hirosawa, Wako-shi, Saitama 351-0198, Japan

Surface Review and Letters (SRL), 2002, vol. 09, issue 01, 561-565

Abstract: Superconducting tunnel junctions (STJs) are applicable to as photon detectors with an energy resolution and a high photon-counting rate. The absorption of a photon in the superconductor of the STJ generates a number of quasiparticles that is proportional to the photon energy. Especially for soft X-ray and extreme ultraviolet (EUV) applications, STJs have good performance because of their high absorption efficiency below 1 keV. We are developing an energy-dispersive photon detector for EUV radiation using STJs with Al trapping layers. We evaluated the performance of the detector for EUV photons by using the Synchrotron Facility at KEK-PF in Tsukuba, Japan. We achieved an energy resolution of FWHM=18 eV (including the external noise of 17.6 eV) for 55 eV EUV photons with a100 × 100 μm2STJ. We present details of the junction design and discuss our experiments and the results.

Date: 2002
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DOI: 10.1142/S0218625X02002646

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