DESIGN AND FABRICATION OF MULTILAYER MIRRORS FOR He-II RADIATION

Yoshifumi Hotta, Minaji Furudate, Masaki Yamamoto and Makoto Watanabe
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Yoshifumi Hotta: Research Institute for Scientific Measurements, Tohoku University, 2-1-1 Katahira, Sendai 980-8577, Japan
Minaji Furudate: Research Institute for Scientific Measurements, Tohoku University, 2-1-1 Katahira, Sendai 980-8577, Japan
Masaki Yamamoto: Research Institute for Scientific Measurements, Tohoku University, 2-1-1 Katahira, Sendai 980-8577, Japan
Makoto Watanabe: Research Institute for Scientific Measurements, Tohoku University, 2-1-1 Katahira, Sendai 980-8577, Japan

Surface Review and Letters (SRL), 2002, vol. 09, issue 01, 571-576

Abstract: Design, fabrication, and reflectance evaluation of multilayer mirrors for He-II radiation are described. Based on the available complex refractive indices of materials at the wavelength of 30.4 nm, Mg, Al, Si, Cr, and C were selected as small absorption material to be paired. Mo/Si and Sc found in previous works were also included. In referring to optimum design for the highest reflectance, multilayers of Al/Mg, Au/Mg, C/Mg, Sc/Mg, C/Si, Al/C, and Mo/Si were fabricated by ion-beam sputtering. The highest reflectance of 27% was observed by a 15-period Mg/Sc mirror.

Date: 2002
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DOI: 10.1142/S0218625X0200266X

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