SOFT X-RAY REFLECTIVITY AND THERMAL STABILITY OF CoCr/C MULTILAYER X-RAY MIRRORS

H. Takenaka, K. Nagai, H. Ito, S. Ichimaru, T. Sakuma, K. Namikawa, Y. Muramatsu, E. Gullikson and C. C. Perera
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H. Takenaka: NTT Advanced Technology Co., Toukai, Ibaraki 319-1193, Japan
K. Nagai: NTT Advanced Technology Co., Toukai, Ibaraki 319-1193, Japan
H. Ito: NTT Advanced Technology Co., Toukai, Ibaraki 319-1193, Japan
S. Ichimaru: NTT Advanced Technology Co., Toukai, Ibaraki 319-1193, Japan
T. Sakuma: Tokyo Gakugei University, Koganei, Tokyo, 184-8501, Japan
K. Namikawa: Tokyo Gakugei University, Koganei, Tokyo, 184-8501, Japan
Y. Muramatsu: Japan Atomic Energy Research Institute, Mikazuki, Hyogo 679-5198, Japan
E. Gullikson: Lawrence Berkeley National Laboratory, Berkeley, CA 94720, USA
C. C. Perera: Lawrence Berkeley National Laboratory, Berkeley, CA 94720, USA

Surface Review and Letters (SRL), 2002, vol. 09, issue 01, 593-596

Abstract: The development of highly reflective multilayer mirrors for use in the wavelength region around 6 nm is desired for X-ray photoemission spectroscopy for inner-shell excitation using a Schwarzschild objective. For this application, reflectivity is the most critical parameter determining the performance of multilayer mirrors, because the reflectivity of multilayers in the 6 nm region is generally very low. We have designed CoCr/C multilayer mirrors with a comparatively high reflectivity at around normal incidence and have fabricated them by magnetron sputtering. The measured peak reflectivity is about 16% at a wavelength of around 6 nm and an incident angle of 88°. The reflectivity remains almost constant for 4 h under 300°C in an Ar atmosphere.

Date: 2002
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DOI: 10.1142/S0218625X02002701

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