A POWERFUL SOURCE OF BROADBAND VUV RADIATION BASED ON A MULTICHANNEL SLIDING DISCHARGE

V. I. Tcheremiskine (), M. L. Sentis, M. P. Sabonnadiere and L. D. Mikheev
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V. I. Tcheremiskine: Laboratoire Lasers, Plasmas et Procédés Photoniques (LP3), FRE 2165 CNRS–Université, Aix-Marseille II, Campus de Luminy, Case 917, 13288 Marseille Cedex 9, France
M. L. Sentis: Laboratoire Lasers, Plasmas et Procédés Photoniques (LP3), FRE 2165 CNRS–Université, Aix-Marseille II, Campus de Luminy, Case 917, 13288 Marseille Cedex 9, France
M. P. Sabonnadiere: Laboratoire Lasers, Plasmas et Procédés Photoniques (LP3), FRE 2165 CNRS–Université, Aix-Marseille II, Campus de Luminy, Case 917, 13288 Marseille Cedex 9, France
L. D. Mikheev: Photochemical Processes Laboratory, P. N. Lebedev Physical Institute, Leninsky prospekt 53, Moscow, 117924, Russia

Surface Review and Letters (SRL), 2002, vol. 09, issue 01, 645-649

Abstract: A powerful source of broadband UV-VUV radiation is developed on the base of a multichannel sliding discharge. The discharge having a radiating surface of hundreds ofcm2is initiated simultaneously along several dozens of parallel linear channels located close to each other. The design of the discharge electric circuit allows a remarkably fast energy deposition into plasma: up to 4 kJ during 1.5 μs. Absolute measurements of discharge VUV radiation are performed by the method of spectrally selective dynamic actinometry. The total photon flux produced by the source within the spectral range of 120–200 nm reaches1026photons/s.

Date: 2002
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DOI: 10.1142/S0218625X02002786

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