Microstructural Study of a Passivation Layer on GaAs: An Application of X-Ray Reflectivity Under Grazing Angles Using a Synchrotron Source
K. E. Crompton,
T. R. Finlayson,
C. Kirchner,
M. Seitz and
U. Klemradt
Additional contact information
K. E. Crompton: School of Physics and Materials Engineering, Monash University, Clayton, 3800, Australia
T. R. Finlayson: School of Physics and Materials Engineering, Monash University, Clayton, 3800, Australia
C. Kirchner: Sektion Physik and Center for NanoScience, Ludwig-Maximilians University, 80539 Munich, Germany
M. Seitz: Sektion Physik and Center for NanoScience, Ludwig-Maximilians University, 80539 Munich, Germany
U. Klemradt: Sektion Physik and Center for NanoScience, Ludwig-Maximilians University, 80539 Munich, Germany
Surface Review and Letters (SRL), 2003, vol. 10, issue 02n03, 373-379
Abstract:
X-ray specular reflectivities of GaAs samples passivated with a thin film of (3-mercaptopropyl)-trimethoxysilane (MPT) have been studied using bending-magnet synchrotron radiation. Various preparation procedures covering etching the GaAs, MPT deposition and its baking have been investigated. An oxide film is always observed between the GaAs and MPT films. The microstructural parameters, such as film thickness, density and interfacial roughness (including the external surface), have been determined from appropriate modeling of the reflectivity. The surface roughness has been compared with a direct measurement using tapping-mode atomic force microscopy. The results are discussed with reference to the potential applications of GaAs as a biosensor.
Date: 2003
References: View complete reference list from CitEc
Citations:
Downloads: (external link)
http://www.worldscientific.com/doi/abs/10.1142/S0218625X03004925
Access to full text is restricted to subscribers
Related works:
This item may be available elsewhere in EconPapers: Search for items with the same title.
Export reference: BibTeX
RIS (EndNote, ProCite, RefMan)
HTML/Text
Persistent link: https://EconPapers.repec.org/RePEc:wsi:srlxxx:v:10:y:2003:i:02n03:n:s0218625x03004925
Ordering information: This journal article can be ordered from
DOI: 10.1142/S0218625X03004925
Access Statistics for this article
Surface Review and Letters (SRL) is currently edited by S Y Tong
More articles in Surface Review and Letters (SRL) from World Scientific Publishing Co. Pte. Ltd.
Bibliographic data for series maintained by Tai Tone Lim ().