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Thermal Decomposition Study of Dimethylaminoethanol on Si(100) by TPD and AES

Sungwon Lim and Kijung Yong ()
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Sungwon Lim: Electrical and Computer Engineering Division, Department of Chemical Engineering, Pohang University of Science and Technology (Postech), Pohang 790-784, Korea
Kijung Yong: Electrical and Computer Engineering Division, Department of Chemical Engineering, Pohang University of Science and Technology (Postech), Pohang 790-784, Korea

Surface Review and Letters (SRL), 2003, vol. 10, issue 04, 685-689

Abstract: Thermal decomposition and desorption of dimethylaminoethanol[dmaeH, (CH3)2NC2H4OH]on Si(100) was studied using temperature-programmed desorption (TPD) and Auger electron spectroscopy (AES). During heating of the sample up to 1100 K, methyliminoacetaldehyde, ethylene, carbon monoxide and hydrogen molecule were desorbed as the main desorption products from dmaeH on Si(100). After TPD experiments, carbon and nitrogen were detected by AES, indicating that complete decomposition of dmaeH also proceeded on Si(100).

Keywords: Dimethylaminoethanol; temperature-programmed desorption; AES (search for similar items in EconPapers)
Date: 2003
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DOI: 10.1142/S0218625X03005402

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