Thermal Decomposition Study of Dimethylaminoethanol on Si(100) by TPD and AES
Sungwon Lim and
Kijung Yong ()
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Sungwon Lim: Electrical and Computer Engineering Division, Department of Chemical Engineering, Pohang University of Science and Technology (Postech), Pohang 790-784, Korea
Kijung Yong: Electrical and Computer Engineering Division, Department of Chemical Engineering, Pohang University of Science and Technology (Postech), Pohang 790-784, Korea
Surface Review and Letters (SRL), 2003, vol. 10, issue 04, 685-689
Abstract:
Thermal decomposition and desorption of dimethylaminoethanol[dmaeH, (CH3)2NC2H4OH]on Si(100) was studied using temperature-programmed desorption (TPD) and Auger electron spectroscopy (AES). During heating of the sample up to 1100 K, methyliminoacetaldehyde, ethylene, carbon monoxide and hydrogen molecule were desorbed as the main desorption products from dmaeH on Si(100). After TPD experiments, carbon and nitrogen were detected by AES, indicating that complete decomposition of dmaeH also proceeded on Si(100).
Keywords: Dimethylaminoethanol; temperature-programmed desorption; AES (search for similar items in EconPapers)
Date: 2003
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DOI: 10.1142/S0218625X03005402
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