THE OPTICAL CHARACTERISTICS OF NITROGEN-DOPED AMORPHOUS CARBON THIN-FILMS GROWN ON NOVEL HEAT-TOLERANT FLEXIBLE PLASTIC SUBSTRATES BY A NEWLY DEVELOPED MICROWAVE SURFACE WAVE PLASMA CHEMICAL VAPOR DEPOSITION METHOD

M. Rusop (), A. M. M. Omer, S. Adhikari, S. Adhikary, H. Uchida, T. Soga, T. Jimbo and M. Umeno
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M. Rusop: Department of Environmental Technology and Urban Planning, Nagoya Institute of Technology, Gokiso-cho, Showa-ku, Nagoya 466-8555, Japan
A. M. M. Omer: Department of Electrical Engineering, Graduate School of Engineering, Chubu University, 1200 Matsumoto-cho, Kasugai 487-8501, Japan
S. Adhikari: Department of Electrical Engineering, Graduate School of Engineering, Chubu University, 1200 Matsumoto-cho, Kasugai 487-8501, Japan
S. Adhikary: Department of Electrical Engineering, Graduate School of Engineering, Chubu University, 1200 Matsumoto-cho, Kasugai 487-8501, Japan
H. Uchida: Department of Electronic Engineering, Faculty of Engineering, Chubu University, 1200 Matsumoto-cho, Kasugai 487-8501, Japan
T. Soga: Department of Environmental Technology and Urban Planning, Nagoya Institute of Technology, Gokiso-cho, Showa-ku, Nagoya 466-8555, Japan
T. Jimbo: Department of Environmental Technology and Urban Planning, Nagoya Institute of Technology, Gokiso-cho, Showa-ku, Nagoya 466-8555, Japan
M. Umeno: Department of Electronic Engineering, Faculty of Engineering, Chubu University, 1200 Matsumoto-cho, Kasugai 487-8501, Japan

Surface Review and Letters (SRL), 2004, vol. 11, issue 06, 585-589

Abstract: Nitrogen-doped amorphous carbon(a-C:N)thin-films have been deposited on novel heat tolerant flexible plastic substrates by a newly developed microwave surface wave plasma chemical vapor deposition (MWSWP-CVD) method. Methane gas and also camphor dissolved with ethyl alcohol gas composition have been used as plasma source. Nitrogen gas has been used as a dopant material fora-C:Nfilms. In this paper, the optical characteristics of absorption coefficients and band gaps fora-C:Nare discussed. The optical band gap ofa-C:Nfilms was found to be approximately 1.7 eV, which is close to the suitable band gap for solar cell. The optical band gap ofa-C:Nwas found to be dependent on the composition gas source pressures.

Keywords: Nitrogen-doped amorphous carbon; a-C:N; nitrogen doping; flexible plastic substrates; optical band gap; surface wave (search for similar items in EconPapers)
Date: 2004
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DOI: 10.1142/S0218625X0400658X

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