PHYSICAL PROPERTIES OFAUANDALTHIN FILMS MEASURED BY RESISTIVE HEATING

F. Avilés, O. Ceh and A. I. Oliva ()
Additional contact information
F. Avilés: Centro de Investigación y de Estudios Avanzados del IPN, Unidad Mérida, Departamento de Física Aplicada, A. P. 73 — Cordemex, 97310, Mérida, Yucatán, México
O. Ceh: Centro de Investigación y de Estudios Avanzados del IPN, Unidad Mérida, Departamento de Física Aplicada, A. P. 73 — Cordemex, 97310, Mérida, Yucatán, México
A. I. Oliva: Centro de Investigación y de Estudios Avanzados del IPN, Unidad Mérida, Departamento de Física Aplicada, A. P. 73 — Cordemex, 97310, Mérida, Yucatán, México

Surface Review and Letters (SRL), 2005, vol. 12, issue 01, 101-106

Abstract: The electrical resistivity (ρ), resistive thermal coefficient (αr), thermal expansion coefficient (αt) and stress (σ) ofAlandAuthin films deposited by thermal evaporation were measured while films were heated by Joule effect. Electrical resistivity measured by the four-probe technique was simultaneously measured with surface film temperature in real time.Aufilms show important variations in theαrand ρ properties when thickness ranged from 0.1μm to 1μm; contrarily,Alfilms show insignificant variations in the 0.1μm to 2γm thickness range. The role of the surface aluminum oxide on these measurements and the intrinsic stress on films determined with grazing incidence X-rays are discussed.

Keywords: Gold; aluminum; resistive thermal coefficients; metallic thin films; 65.70.+y; 67.80.Gb; 68.55.Jk; 81.05.Bx; 73.61.At (search for similar items in EconPapers)
Date: 2005
References: View complete reference list from CitEc
Citations:

Downloads: (external link)
http://www.worldscientific.com/doi/abs/10.1142/S0218625X05006834
Access to full text is restricted to subscribers

Related works:
This item may be available elsewhere in EconPapers: Search for items with the same title.

Export reference: BibTeX RIS (EndNote, ProCite, RefMan) HTML/Text

Persistent link: https://EconPapers.repec.org/RePEc:wsi:srlxxx:v:12:y:2005:i:01:n:s0218625x05006834

Ordering information: This journal article can be ordered from

DOI: 10.1142/S0218625X05006834

Access Statistics for this article

Surface Review and Letters (SRL) is currently edited by S Y Tong

More articles in Surface Review and Letters (SRL) from World Scientific Publishing Co. Pte. Ltd.
Bibliographic data for series maintained by Tai Tone Lim ().