THE PROPERTIES OF AMORPHOUS CARBON NITRIDE THIN FILMS SYNTHESIZED BY PULSED LASER DEPOSITION WITH VARIOUS PREPARATION CONDITIONS

M. Rusop (), T. Soga and T. Jimbo
Additional contact information
M. Rusop: Department of Environmental Technology and Urban Planning, Nagoya Institute of Technology, Gokiso-cho, Showa-ku, Nagoya 466-8555, Japan
T. Soga: Department of Environmental Technology and Urban Planning, Nagoya Institute of Technology, Gokiso-cho, Showa-ku, Nagoya 466-8555, Japan
T. Jimbo: Department of Environmental Technology and Urban Planning, Nagoya Institute of Technology, Gokiso-cho, Showa-ku, Nagoya 466-8555, Japan

Surface Review and Letters (SRL), 2005, vol. 12, issue 03, 333-342

Abstract: Surface morphology, deposition rate, bonding composition, structural, optical and electrical properties ofXeClexcimer pulsed laser deposited amorphous carbon nitride(a-CNx)films using camphoric carbon(C10H16O)target in 0.8 Torr nitrogen(N)gas ambient as a function of laser fluences (LF) (from 2.8 to 5.2 J/cm2) with fixed target-to-substrate distances (TSD) at 45 mm and substrate temperatures (ST) at 20°C; TSD (from 25 to 45 mm) with fixed LF at 3.4 J/cm2and ST at 20°C; and ST (from 20 to 500°C) with fixed LF at 3.4 J/cm2and TSD at 45 mm are reported. At fixed TSD and ST, the surface roughness, particle density, deposition rate andNcontent increase, whereas the particle size decreases with higher LF. When the LF and ST are fixed, decreasing TSD results in an increase in the irregular small particle size, particle density, surface roughness, deposition rate,Ncontent. On the other hand, when the LF and TSD are fixed, the surface roughness, particle density and particle size increase, whereas the deposition rate decreases with higher ST. TheNcontent increases with ST up to 400°C and decreases thereafter. We found that the amorphous structure ofa-CNxfilms and the ratio of sp2trihedral component to sp3tetrahedral component are strongly dependent on the LF, TSD and ST. Thea-CNxfilms with highNcontent have relatively high electrical resistivity.

Keywords: Amorphous carbon nitride; deposition parameter; pulsed laser deposition (search for similar items in EconPapers)
Date: 2005
References: View complete reference list from CitEc
Citations:

Downloads: (external link)
http://www.worldscientific.com/doi/abs/10.1142/S0218625X05007128
Access to full text is restricted to subscribers

Related works:
This item may be available elsewhere in EconPapers: Search for items with the same title.

Export reference: BibTeX RIS (EndNote, ProCite, RefMan) HTML/Text

Persistent link: https://EconPapers.repec.org/RePEc:wsi:srlxxx:v:12:y:2005:i:03:n:s0218625x05007128

Ordering information: This journal article can be ordered from

DOI: 10.1142/S0218625X05007128

Access Statistics for this article

Surface Review and Letters (SRL) is currently edited by S Y Tong

More articles in Surface Review and Letters (SRL) from World Scientific Publishing Co. Pte. Ltd.
Bibliographic data for series maintained by Tai Tone Lim ().