DEVELOPMENT OF PREPARATION OF THE FUNCTIONAL THIN FILMS BY PULSED LASER DEPOSITION

Yafan Zhao, Chuanzhong Chen (), Lubin Chen and Quanhe Bao
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Yafan Zhao: School of Materials Science and Engineering, Shandong University, Jinan 250061, P. R. China;
Chuanzhong Chen: School of Materials Science and Engineering, Shandong University, Jinan 250061, P. R. China
Lubin Chen: School of Materials Science and Engineering, Shandong University, Jinan 250061, P. R. China
Quanhe Bao: School of Materials Science and Engineering, Shandong University, Jinan 250061, P. R. China

Surface Review and Letters (SRL), 2005, vol. 12, issue 04, 597-604

Abstract: Pulsed laser deposition (PLD) exhibits unique advantages for the preparation of functional thin films which are widely used in microelectronics, photoelectrons, integrate circuits, superconductors and biomedical fields. The principle of and the characteristics of PLD are introduced, its applications in ferroelectrics, high-temperature superconductors, diamond-like and superlattices. The future application trend is reviewed.

Keywords: Pulsed laser deposition (PLD); functional thin film; preparation; application (search for similar items in EconPapers)
Date: 2005
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DOI: 10.1142/S0218625X05007487

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