CALCULATION AND PLOTTING OF STANDARD FREE ENERGY CHANGES AND EQUILIBRIUM CONSTANTS FOR CVD HARD COATINGS REACTIONS

Sha Liu and Jing Qiu Zhang
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Sha Liu: School of Materials Science and Engineering, Central South University, Changsha, Hunan, 410083, P. R. China;
Jing Qiu Zhang: Institute of Information Science and Engineering, Central South University, Changsha, Hunan, 410083, P. R. China

Surface Review and Letters (SRL), 2005, vol. 12, issue 05n06, 727-731

Abstract: CVD (chemical vapor deposition) coatings such asTiC,TiN,Al2O3and so on are widely used as tools' surface preserved materials with corrosion resistance and wear resistance. Standard Gibbs free energy changes for reactions are widely used to approximately analyze the trends of substance reactions and phase transitions in chemical reactions, metallurgy processes, materials synthesis and processing. Hard coatings and thin films can be prepared by CVD process. Accurate calculation and plotting of the standard free energy changes and equilibrium constants for CVDTiC,TiN,Al2O3coatings reactions are realized using the developed general computer program. Only inputting the basic thermodynamic data tabulated in data books into the computer program, the relationships of the standard free energy changes and equilibrium constants for most reactions with the temperatures can be gained in the same diagrams.

Keywords: Calculation and plotting; standard free energy change; equilibrium constant; CVD coatings (search for similar items in EconPapers)
Date: 2005
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DOI: 10.1142/S0218625X05007955

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