PHOTOLUMINESCENCE PROPERTIES OFErDOPED INTOC-RICHSiCNANOPARTICLE FILMS

Shiyong Huang, S. Xu, Jidong Long, Z. Sun, X. Z. Wang, Y. W. Chen, T. Chen, C. Ni, Z. J. Zhang, L. L. Wang, X. D. Li, P. S. Guo and W. X. Que
Additional contact information
Shiyong Huang: Nanotech. Center, Physics Department, East China Normal University, Shanghai 200062, P. R. China;
S. Xu: Plasma Source and Application Center, NIE, Nanyang Technological University, 1 Nanyang Walk, Singapore 637616, Singapore
Jidong Long: Plasma Source and Application Center, NIE, Nanyang Technological University, 1 Nanyang Walk, Singapore 637616, Singapore
Z. Sun: Nanotech. Center, Physics Department, East China Normal University, Shanghai 200062, P. R. China
X. Z. Wang: Nanotech. Center, Physics Department, East China Normal University, Shanghai 200062, P. R. China
Y. W. Chen: Nanotech. Center, Physics Department, East China Normal University, Shanghai 200062, P. R. China
T. Chen: Nanotech. Center, Physics Department, East China Normal University, Shanghai 200062, P. R. China
C. Ni: Nanotech. Center, Physics Department, East China Normal University, Shanghai 200062, P. R. China
Z. J. Zhang: Nanotech. Center, Physics Department, East China Normal University, Shanghai 200062, P. R. China
L. L. Wang: Nanotech. Center, Physics Department, East China Normal University, Shanghai 200062, P. R. China
X. D. Li: Nanotech. Center, Physics Department, East China Normal University, Shanghai 200062, P. R. China
P. S. Guo: Nanotech. Center, Physics Department, East China Normal University, Shanghai 200062, P. R. China
W. X. Que: Nanotech. Center, Physics Department, East China Normal University, Shanghai 200062, P. R. China

Surface Review and Letters (SRL), 2006, vol. 13, issue 01, 123-126

Abstract: Polycrystalline silicon carbide(P-SiC)films containingSiCnanoparticles andErwere prepared by r.f. reactive magnetron co-sputtering technique withSiCandErtargets on low-temperature silicon (111) and silicon dioxide substrates with the mixed gas of pure argon, methane, and hydrogen. Surface morphology and photoluminescence (PL) properties of them were measured by field-emission scanning electron microscope and Raman spectroscopy. The peak position, intensity, and the full width at half maximum (FWHM) of PL spectra were relevant withErdoping levels and deposition conditions.

Keywords: Nanoparticle; co-sputtering; photoluminescence; Er-doped (search for similar items in EconPapers)
Date: 2006
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DOI: 10.1142/S0218625X06007834

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