SUPERHYDROPHOBIC SURFACES PREPARED BY PLASMA FLUORINATION OF LOTUS-LEAF-LIKE AMORPHOUS CARBON FILMS

Ying Zhou, Xuemei Song, Munan Yu, Bo Wang () and Hui Yan
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Ying Zhou: Laboratory of Thin Film Materials, Beijing University of Technology, Beijing 100022, P. R. China
Xuemei Song: Laboratory of Thin Film Materials, Beijing University of Technology, Beijing 100022, P. R. China
Munan Yu: Laboratory of Thin Film Materials, Beijing University of Technology, Beijing 100022, P. R. China
Bo Wang: Laboratory of Thin Film Materials, Beijing University of Technology, Beijing 100022, P. R. China
Hui Yan: Laboratory of Thin Film Materials, Beijing University of Technology, Beijing 100022, P. R. China

Surface Review and Letters (SRL), 2006, vol. 13, issue 01, 117-122

Abstract: Lotus-leaf-like amorphous carbon(a-C)films were fabricated on glass andSisubstrates by a magnetron sputtering system and fluorinated in carbon tetrafluoride plasma. The fluorinated films(a-C:F)had a maximum contact angle (CA) of about 162°, which is much larger than that of the nonfluorinated films (105°). Furthermore, the geometric microstructure and chemical composition of thea-C:Ffilms were investigated by scanning electron microscopy and Fourier transform infrared spectrometry, respectively. The characterization results indicated that the CA on the surfaces of thea-C:Ffilms can be improved remarkably by the plasma-fluorinated process. Sucha-C:Ffilms that combine superhydrophobicity with other properties may have many potential applications.

Keywords: Superhydrophobic; amorphous carbon films; wettability; plasma fluorination; scanning electron microscopy (search for similar items in EconPapers)
Date: 2006
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DOI: 10.1142/S0218625X06007895

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