MAGNETRON SPUTTERING DEPOSITION OF POLYCRYSTALLINECrN/ZrNSUPERLATTICE COATINGS

M. X. Wang, J. J. Zhang, Q. X. Liu and D. J. Li ()
Additional contact information
M. X. Wang: College of Physics and Electronic Information Science, Tianjin Normal University, Tianjin 300074, China
J. J. Zhang: College of Physics and Electronic Information Science, Tianjin Normal University, Tianjin 300074, China
Q. X. Liu: College of Physics and Electronic Information Science, Tianjin Normal University, Tianjin 300074, China
D. J. Li: College of Physics and Electronic Information Science, Tianjin Normal University, Tianjin 300074, China

Surface Review and Letters (SRL), 2006, vol. 13, issue 02n03, 173-177

Abstract: The influence of substrate rotary speed, species of reaction gases and flows on nanoindentation, nanoscratch fracture, and residual stress were explored on reactive sputtered nanoscaleCrN/ZrNmultilayered coatings. Hardness and critical fracture load as high as 32 GPa and 85 mN with desirable compressive stress were achieved for this model. A proper percentage ofNH3inN2reaction gas was also proved to be of benefit to synthesize high-hard and fracture-resistantCrN/ZrNcoatings. The low-angle XRD patterns provided the layer modulation period of the coatings. A marked polycrystallite of two-cubicNaClphaseCrN+ZrNas well as probably hexagonalCr2Nwith small modulation period corresponded to the enhanced mechanical properties.

Keywords: Magnetron sputtering; CrN/ZrN; multilayered coating; nanoindentation (search for similar items in EconPapers)
Date: 2006
References: View complete reference list from CitEc
Citations:

Downloads: (external link)
http://www.worldscientific.com/doi/abs/10.1142/S0218625X06008177
Access to full text is restricted to subscribers

Related works:
This item may be available elsewhere in EconPapers: Search for items with the same title.

Export reference: BibTeX RIS (EndNote, ProCite, RefMan) HTML/Text

Persistent link: https://EconPapers.repec.org/RePEc:wsi:srlxxx:v:13:y:2006:i:02n03:n:s0218625x06008177

Ordering information: This journal article can be ordered from

DOI: 10.1142/S0218625X06008177

Access Statistics for this article

Surface Review and Letters (SRL) is currently edited by S Y Tong

More articles in Surface Review and Letters (SRL) from World Scientific Publishing Co. Pte. Ltd.
Bibliographic data for series maintained by Tai Tone Lim ().