GROWTH CONTROL OFZnOFILMS ON GLASS BY CHEMICAL BATH DEPOSITION

Munan Yu, Haiyan Xu, Hao Wang (), Hui Yan, Zhiliang Pei, Jun Gong and Chao Sun
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Munan Yu: Laboratory of Thin Film Materials, Beijing University of Technology, Beijing 100022, P. R. China
Haiyan Xu: Laboratory of Thin Film Materials, Beijing University of Technology, Beijing 100022, P. R. China
Hao Wang: Laboratory of Thin Film Materials, Beijing University of Technology, Beijing 100022, P. R. China
Hui Yan: Laboratory of Thin Film Materials, Beijing University of Technology, Beijing 100022, P. R. China
Zhiliang Pei: Institute of Metal Research, Chinese Academy of Sciences, 72 Wenhua Road, Shenyang 110016, P. R. China
Jun Gong: Institute of Metal Research, Chinese Academy of Sciences, 72 Wenhua Road, Shenyang 110016, P. R. China
Chao Sun: Institute of Metal Research, Chinese Academy of Sciences, 72 Wenhua Road, Shenyang 110016, P. R. China

Surface Review and Letters (SRL), 2006, vol. 13, issue 04, 369-373

Abstract: The effects of substrate-placing manner, deposition temperature and solution concentration on the preparation ofZnOfilms by chemical bath deposition were investigated in this work. The structures and the morphologies of as-depositedZnOfilms were characterized by X-ray diffraction and scanning electron microscope, respectively. The results show that compared with vertically insertion, floating the substrates on the solutions could greatly improve thec-axis orientation of the films. The growth ofZnOfilms with orientation would also be favored at lower precursor concentrations and temperatures. When the concentration ofZn(CH3COO)2·2H2Ois 0.033 M/L and the deposited temperature is 60°C,ZnOfilms which are well crystallized and highlyc-axis orientated were obtained.

Keywords: ZnOfilms; chemical bath deposition; orientation (search for similar items in EconPapers)
Date: 2006
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DOI: 10.1142/S0218625X06008335

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