THEORETICAL ANALYSES FOR LASER MACHINING MICROCHANNELS AND DEMONSTRATION OF THEIR USES IN MANUFACTURE OF A MICROFLUIDIC OPTICAL SWITCH

Daniel Lim, Erna Gondo Santoso, Kim Ming Teh, Stephen Wan and H. Y. Zheng ()
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Daniel Lim: Singapore Institute of Manufacturing Technology, 71 Nanyang Drive, Singapore 638075, Singapore
Erna Gondo Santoso: Nanyang Technological University, Nanyang Avenue, Singapore, 639798, Singapore
Kim Ming Teh: Singapore Institute of Manufacturing Technology, 71 Nanyang Drive, Singapore 638075, Singapore
Stephen Wan: Singapore Institute of Manufacturing Technology, 71 Nanyang Drive, Singapore 638075, Singapore
H. Y. Zheng: Singapore Institute of Manufacturing Technology, 71 Nanyang Drive, Singapore 638075, Singapore

Surface Review and Letters (SRL), 2006, vol. 13, issue 06, 795-802

Abstract: Silicon has been widely used to fabricate microfluidic devices due to the dominance of silicon microfabrication technologies available. In this paper, theoretical analyses are carried out to suggest suitable laser machining parameters to achieve required channel geometries. Based on the analyses, a low-powerCO2laser was employed to create microchannels in Acrylic substrate for the use of manufacturing an optical bubble switch. The developed equations are found useful for selecting appropriate machining parameters. The ability to use a low-costCO2laser to fabricate microchannels provides an alternative and cost-effective method for prototyping fluid flow channels, chambers and cavities in microfluidic lab chips.

Keywords: Laser micromachining; CO2laser; microfluidic; optical bubble switch (search for similar items in EconPapers)
Date: 2006
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DOI: 10.1142/S0218625X06008876

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