FABRICATION OF TRUE-COLOR MICROPATTERNS BY 2D STEPWISE CONTRACTION AND ADSORPTION NANOLITHOGRAPHY (SCAN)

Hai Li, Xiao-Dong Zhang (), Yi Zhang, Zhen-Qian Ouyang and Jun Hu
Additional contact information
Hai Li: Shanghai Institute of Applied Physics, Chinese Academy of Sciences, P.O. Box 800-204, Shanghai 201800, P. R. China;
Xiao-Dong Zhang: Bio-X DNA Computer Consortium, Bio-X Life Science Research Center, College of Life Science and Biotechnology, Shanghai JiaoTong University, 800 Dongchuan Road, Shanghai 200240, P. R. China
Yi Zhang: Shanghai Institute of Applied Physics, Chinese Academy of Sciences, P.O. Box 800-204, Shanghai 201800, P. R. China
Zhen-Qian Ouyang: Bio-X DNA Computer Consortium, Bio-X Life Science Research Center, College of Life Science and Biotechnology, Shanghai JiaoTong University, 800 Dongchuan Road, Shanghai 200240, P. R. China
Jun Hu: Shanghai Institute of Applied Physics, Chinese Academy of Sciences, P.O. Box 800-204, Shanghai 201800, P. R. China;

Surface Review and Letters (SRL), 2007, vol. 14, issue 01, 129-134

Abstract: Fabrication of structures on the micro- and nanometer scales is of great importance for both fundamental research and potential applications. While microlithography methods are relatively established, the production of multi-component micro- and nanostructures with high density still presents difficulties. In this paper, a novel strategy termed as two-dimensional (2D) stepwise contraction and adsorption nanolithography (SCAN) is used to fabricate true-color micropatterns through a series of size-reduction process based on the physical elasticity of elastomer. Faithful multicolor patterns with feature size about 30 times smaller than the initial ones can be fabricated by employing the 2D SCAN. The simplicity and high throughput capability of SCAN make it a competitive alternative to other micro- and nanolithography techniques.

Keywords: Size reduction; high density; multicolor micropatterns; contact printing; 2D stepwise contraction; adsorption nanolithography (SCAN) (search for similar items in EconPapers)
Date: 2007
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DOI: 10.1142/S0218625X07009141

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