EFFECT OF PRE-HEATING TEMPERATURE ON THE CHARACTERISTICS OF PZT THIN FILMS GROWN BY USING A TRIOL SOL–GEL ROUTE

Sarawut Thountom, Manoch Naksata, Kenneth Mackenzie and Tawee Tunkasiri
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Sarawut Thountom: Department of Physics, Faculty of Science, Chiang Mai University, Chiang Mai 50200, Thailand
Manoch Naksata: Department of Physics, Faculty of Science, Chiang Mai University, Chiang Mai 50200, Thailand
Kenneth Mackenzie: School of Chemical and Physical Sciences, Faculty of Science, Victoria University of Wellington, Wellington 6005, New Zealand
Tawee Tunkasiri: Department of Physics, Faculty of Science, Chiang Mai University, Chiang Mai 50200, Thailand

Surface Review and Letters (SRL), 2007, vol. 14, issue 02, 229-234

Abstract: Lead zirconate titanate (PZT) films with compositions near the morphotropic phase boundary were fabricated onPt(111)/Ti/SiO2/Si(100)using the triol sol–gel method. The effect of the pre-heating temperature on the phase transformations, microstructures, electrical properties, and ferroelectric properties of the PZT thin films was investigated. Randomly oriented PZT thin films pre-heated at 400°C for 10 min and annealed at 600°C for 30 min showed well-defined ferroelectric hysteresis loops with a remnant polarization of 26.57 μC/cm2and a coercive field of 115.42 kV/cm. The dielectric constant and dielectric loss of the PZT films were 621 and 0.0395, respectively. The microstructures of the thin films are dense, crack-free, and homogeneous with fine grains about 15–20 nm in size.

Keywords: Sol–gel; PZT thin films; spins coating (search for similar items in EconPapers)
Date: 2007
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DOI: 10.1142/S0218625X0700930X

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