INFLUENCE OF THE TECHNICAL PARAMETERS ON BIOACTIVE FILMS DEPOSITED BY PULSED LASER

Yafan Zhao, Chuanzhong Chen (), Mingda Song and Jian Liu
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Yafan Zhao: School of Materials Science and Engineering, Shandong University, Jinan 250061, P. R. China;
Chuanzhong Chen: School of Materials Science and Engineering, Shandong University, Jinan 250061, P. R. China
Mingda Song: School of Mechanical Engineering, Shandong University, Jinan 250061, P. R. China
Jian Liu: School of Mechanical Engineering, Shandong University, Jinan 250061, P. R. China

Surface Review and Letters (SRL), 2007, vol. 14, issue 02, 283-291

Abstract: Pulsed laser deposition (PLD), which is a novel technique in producing thin films in the recent years, shows unique advantages for the deposition of bioactive films. Research states of the technical parameters of the pulsed laser deposited bioactive films, including substrate temperature, atmosphere pressure, energy density, wavelength, post-annealing, target, deposition rate, and thickness of the films, are systematically reviewed. Processing-microstructure-property relationships of bioactive films by pulsed laser deposition are discussed. The application prospect is pointed as well.

Keywords: Bioactive film; pulsed laser deposition; technical parameters (search for similar items in EconPapers)
Date: 2007
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DOI: 10.1142/S0218625X07009372

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