SYNTHESIS OF DIAMOND-LIKE CARBON FILMS USING A BI-MODAL SPUTTER DEPOSITION WITHXeIONS

Maksym Rybachuk and John M. Bell
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Maksym Rybachuk: Faculty of Built Environment and Engineering, Queensland University of Technology, Gardens Point, 2 George St., Brisbane Qld 4001, Australia
John M. Bell: Faculty of Built Environment and Engineering, Queensland University of Technology, Gardens Point, 2 George St., Brisbane Qld 4001, Australia

Surface Review and Letters (SRL), 2007, vol. 14, issue 04, 735-738

Abstract: An alternative approach to a sputtering process was examined where a single incident beam ofXeions was used to simultaneously sputter a carbon target and bombard a growing film. The hypothesis that by positioning a substrate at grazing angles to the central axis of the ion beam, the additional energy provided will be beneficial to the formation of sp3bonding. Amorphous carbon (a-C) and diamond-like carbon (DLC) films were synthesized by sputtering a graphite target from a Kaufmann-type ion source. Experimental results revealed that when a substrate was placed at grazing angles due to a secondary resputtering process, it was not possible to fabricate DLCs but only sp2-rich polymerica-C. For DLC synthesis the optimal angles of the target and the substrate to the ion flux were found to be 30° and 0°, respectively, and the ion energies of 0.8–1 keV.

Date: 2007
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DOI: 10.1142/S0218625X07010081

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