HOMO-EPITAXIAL GROWTH ONZnOSUBSTRATE BY MO-CVD USING(C5H7O2)2

Koich Haga (), Toetsu Shishido, Kazuo Nakajima and Takahiro Matsunaga
Additional contact information
Koich Haga: Sendai National College of Technology, Aayasi Tyuoh, Aoba-ku, Sendai 989-3128, Japan
Toetsu Shishido: Institute for Materials Research, Tohoku University, Sendai 980-8577, Japan
Kazuo Nakajima: Institute for Materials Research, Tohoku University, Sendai 980-8577, Japan
Takahiro Matsunaga: Tosoh Corporation, Yamaguchi 746-8501, Japan

Surface Review and Letters (SRL), 2007, vol. 14, issue 04, 783-787

Abstract: High quality homo-epitaxialZnOfilms were grown onZn-terminated surfaces ofZnO(0001) single-crystal substrates with high-temperature annealing andAr+ion etching. These films were prepared by low-pressure MO-CVD using zinc acetylacetonate(C5H7O2)2and oxygen as source materials. High qualityZnO(0001) substrate was synthesized by the hydrothermal technique. The atomically flat surface without scratches was obtained by high temperature annealing at 800°C–1300°C in oxygen atmosphere.Ar+ion etching for the surface ofZnOsubstrates was critically important to the growth ofZnOfilms with good crystallinity. The epitaxial film and theZnOsubstrate were characterized using reflection high-energy electron diffraction, atomic force microscope, and X-ray photoelectron spectroscopy.

Date: 2007
References: View complete reference list from CitEc
Citations:

Downloads: (external link)
http://www.worldscientific.com/doi/abs/10.1142/S0218625X07010263
Access to full text is restricted to subscribers

Related works:
This item may be available elsewhere in EconPapers: Search for items with the same title.

Export reference: BibTeX RIS (EndNote, ProCite, RefMan) HTML/Text

Persistent link: https://EconPapers.repec.org/RePEc:wsi:srlxxx:v:14:y:2007:i:04:n:s0218625x07010263

Ordering information: This journal article can be ordered from

DOI: 10.1142/S0218625X07010263

Access Statistics for this article

Surface Review and Letters (SRL) is currently edited by S Y Tong

More articles in Surface Review and Letters (SRL) from World Scientific Publishing Co. Pte. Ltd.
Bibliographic data for series maintained by Tai Tone Lim ().