ADHERENT NANO-SUPERHARD TITANIUM NITRIDE FILM AND ITS FORMING MECHANISM IN MULTI-ARC ION-PLATING SYSTEM

Xiang Yu (), Chengbiao Wang, Meng Hua, Puilam Tam, Yang Liu and Deyang Yu
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Xiang Yu: School of Engineering and Technology, China University of Geosciences, 29 Xueyuan Road, Beijing 100083, China
Chengbiao Wang: School of Engineering and Technology, China University of Geosciences, 29 Xueyuan Road, Beijing 100083, China
Meng Hua: Manufacturing Engineering & Engineering Management Department, City University of Hong Kong, Tat Chee Avenue Kowloon, Hong Kong, China
Puilam Tam: Manufacturing Engineering & Engineering Management Department, City University of Hong Kong, Tat Chee Avenue Kowloon, Hong Kong, China
Yang Liu: Beijing Powertech Co. Ltd., 63 Dongshanposanli Changxindian Fengtai, Beijing 100072, China
Deyang Yu: Beijing Powertech Co. Ltd., 63 Dongshanposanli Changxindian Fengtai, Beijing 100072, China

Surface Review and Letters (SRL), 2007, vol. 14, issue 04, 789-793

Abstract: An adherent nano-superhard titanium nitride (TiN) film on the substrate ofCr12Mo4Vhigh speed steel was prefabricated in a vacuum cathode multi-arc ion-plating system. Microhardness, film-to-substrate adhesion, and microstructure of the film were investigated typically using Vickers hardometer, scratch tester, and X-ray diffractometer. Results show that: (i) the achievable film microhardness is in the range of 35–45 GPa; (ii) the critical load (Lc) of the superhardTiNfilm is approximately 64 N; (iii) the nm scale mean main grain sizes of the film are approximately of 12.7 nm forTiN111, 19.7 nm forTiN200, and 9.6 nm forTiN220; and (iv) compared with the standardTiNfilm with the hardness of 22 GPa, the accomplishment of the nano-superhardTiNfilm may be due to (a) the ion bombardment induced residual stress within the film, and (b) the combined effect of the decrease of crystalline size and preferred orientation in the plane (111).

Keywords: SuperhardTiNfilm; mechanical property; crystalline size; preferential orientation (search for similar items in EconPapers)
Date: 2007
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DOI: 10.1142/S0218625X07010275

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