STRUCTURAL AND OPTICAL PROPERTIES OFZnOTHIN FILMS GROWN ON FLEXIBLE POLYIMIDE SUBSTRATES

Dong Ick Son, Jung Wook Lee, Dea Uk Lee, Tae Whan Kim and Won Kook Choi
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Dong Ick Son: Department of Information Display Engineering, Hanyang University, 17 Haengdang-dong, Seongdong-gu, Seoul 133-791, Korea
Jung Wook Lee: Division of Electronics and Computer Engineering, Hanyang University, 17 Haengdang-dong, Seongdong-gu, Seoul 133-791, Korea
Dea Uk Lee: Division of Electronics and Computer Engineering, Hanyang University, 17 Haengdang-dong, Seongdong-gu, Seoul 133-791, Korea
Tae Whan Kim: Division of Electronics and Computer Engineering, Hanyang University, 17 Haengdang-dong, Seongdong-gu, Seoul 133-791, Korea
Won Kook Choi: Korea Institute of Science and Technology, Thin Film Materials Research Center, Seoul 130-650, Korea

Surface Review and Letters (SRL), 2007, vol. 14, issue 04, 801-805

Abstract: Nominally undopedZnOthin films were grown on polyimide (PI) substrates at various temperatures by using radio-frequency magnetron sputtering. Atomic force microscopy images showed that the root mean squares of the average surface roughnesses for theZnOthin films grown on the PI substrates at 27°C, 100°C, 200°C, and 300°C were 4.08, 4.50, 4.18, and 3.89 nm, respectively. X-ray diffraction patterns showed that the crystallinity of theZnOfilms had a preferential (0001) direction and that the full width at half-maxima for the (0002)ZnOdiffraction peak for theZnOthin films grown on the PI substrates at 27°C, 100°C, 200°C, and 300°C were 0.22, 0.22, 0.22, and 0.23, respectively. The average optical transmittances in the visible ranges between 550 and 750 nm for theZnO/PI heterostructures grown at 27°C, 100°C, 200°C, and 300°C were 87%, 83%, 87%, and 78%, respectively.

Keywords: ZnOthin film; polyimide; structural properties; optical properties (search for similar items in EconPapers)
Date: 2007
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DOI: 10.1142/S0218625X07010287

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