MECHANICAL BEHAVIORS OF QUENCHED IRON FILM SPUTTERING DEPOSITED ON GLASS SUBSTRATE

Yong-Ju Zhang (), Sen-Jiang Yu (), Ping-Gen Cai and Hong Zhou
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Yong-Ju Zhang: Department of Physics, Taizhou University, Linhai 317000, China
Sen-Jiang Yu: Department of Physics, China Jiliang University, Hangzhou 310018, China;
Ping-Gen Cai: Department of Physics, Zhejiang University, Hangzhou 310027, China
Hong Zhou: Department of Physics, China Jiliang University, Hangzhou 310018, China

Surface Review and Letters (SRL), 2007, vol. 14, issue 05, 879-884

Abstract: A characteristic wedge-shaped iron(Fe)film system, deposited on glass substrate by a DC-magnetron sputtering method and quenched by silicone oil during deposition, has been successfully fabricated. The mechanical behaviors of the quenched and non-quenchedFefilms have been compared and analyzed. The internal stress is found to transform from tension to compression in nature after quenching, which results in the formation of buckling pattern in the quenchedFefilm while crack pattern in the non-quenched film. It is proposed that the origin of the compressive stress is mainly due to freezing of theFeatoms (or clusters) with high kinetic energy and doping of the oil molecules into theFefilm defects.

Keywords: Quenched film; compressive stress; buckling pattern; sputtering (search for similar items in EconPapers)
Date: 2007
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DOI: 10.1142/S0218625X07010366

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