EFFECT OF FILTER COIL CURRENT ON PROPERTIES OFnc-TiC/a-C:HNANOCOMPOSITE FILM PREPARED BY DUAL PLASMA TECHNIQUE

Yaohui Wang, Xu Zhang (), Xianying Wu, Huixing Zhang and Xiaoji Zhang
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Yaohui Wang: Key Laboratory of Beam Technology and Material, Modification of Ministry of Education, Institution of Low Energy Nuclear Physics, Beijing Normal University, Beijing Radiation Center, 100875 Beijing, China
Xu Zhang: Key Laboratory of Beam Technology and Material, Modification of Ministry of Education, Institution of Low Energy Nuclear Physics, Beijing Normal University, Beijing Radiation Center, 100875 Beijing, China
Xianying Wu: Key Laboratory of Beam Technology and Material, Modification of Ministry of Education, Institution of Low Energy Nuclear Physics, Beijing Normal University, Beijing Radiation Center, 100875 Beijing, China
Huixing Zhang: Key Laboratory of Beam Technology and Material, Modification of Ministry of Education, Institution of Low Energy Nuclear Physics, Beijing Normal University, Beijing Radiation Center, 100875 Beijing, China
Xiaoji Zhang: Key Laboratory of Beam Technology and Material, Modification of Ministry of Education, Institution of Low Energy Nuclear Physics, Beijing Normal University, Beijing Radiation Center, 100875 Beijing, China

Surface Review and Letters (SRL), 2007, vol. 14, issue 06, 1143-1148

Abstract: Nanocompositenc-TiC/a-C:Hfilms, with an unusual combination of superhardness and high elastic recovery, are prepared by using dual plasma technique. The effect of the filter coil current on the compositional and structural properties of thenc-TiC/a-C:Hfilms has been investigated. It is found that the deposition rate and the composition ofnc-TiC/a-C:Hfilms could be changed by varying the filter coil current. Fortunately, by selecting the proper value of the filter coil current, 2.5 A, one can remarkably enhance the mechanical properties of the film, such as the superhardness (66.4 GPa), the high elastic modulus (510 GPa), and the high elastic recovery (83.3%).

Keywords: Nanocompositenc-TiC/a-C:H; plasma; mechanical property; filter coil current (search for similar items in EconPapers)
Date: 2007
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DOI: 10.1142/S0218625X0701072X

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