STUDY ON METAL MEMBRANE TEMPERATURE SENSOR AND MICROHEATER FOR PCR CHIP

Weiping Yan (), Ning Xue, Xinghui Shi, Junshan Liu and Jihong Guo
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Weiping Yan: Department of Electronic Engineering, Dalian University of Technology, Dalian, 116024, P. R. China
Ning Xue: Department of Electronic Engineering, Dalian University of Technology, Dalian, 116024, P. R. China
Xinghui Shi: Department of Electronic Engineering, Dalian University of Technology, Dalian, 116024, P. R. China
Junshan Liu: Research Center for Micro System Technology, Dalian University of Technology, Dalian, 116024, P. R. China
Jihong Guo: Research Center for Micro System Technology, Dalian University of Technology, Dalian, 116024, P. R. China

Surface Review and Letters (SRL), 2008, vol. 15, issue 01n02, 183-187

Abstract: The development of PCR chip shortens the reaction time of DNA amplification, reduces the bulk of reaction reagents; therefore, it is widely applied to biomedicine and other related fields. Since PCR reaction is completed through three different precise temperature zones periodically, the sensitivity of temperature measurement and the heating property of the metal membrane must be highly regarded. In this paper, three kinds of membranes,Ni,Pt, andNi–Cr, were fabricated on silicon substrates; their resistance–temperature characteristics and heating properties are discussed. The results show thatNiandPtfilms have good linear resistance–temperature relationship; the heating property ofPtfilm is superior to that ofNi–Crfilm. The PCR chip withPtfilm microheater can reach 150°C in a short time with 25 V voltage.

Keywords: PCR Chip; metal membrane; temperature sensor; microheater (search for similar items in EconPapers)
Date: 2008
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DOI: 10.1142/S0218625X08011184

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