CRACKING AND EXFOLIATION OFTiO2FILM IRRADIATED WITH EXCIMER LASER

H. X. Qian, W. Zhou () and H. Y. Zheng
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H. X. Qian: Shenzhen Key Laboratory of Special Functional Materials, Shenzhen University, Shenzhen 518060, P. R. China
W. Zhou: Precision Engineering and Nanotechnology Centre, School of Mechanical and Aerospace Engineering, Nanyang Technological University, 50 Nanyang Avenue, Singapore 639798, Singapore
H. Y. Zheng: Singapore Institute of Manufacturing Technology, 71 Nanyang Drive, Singapore 638075, Singapore

Surface Review and Letters (SRL), 2008, vol. 15, issue 04, 473-479

Abstract: TiO2film deposited on glass was irradiated in air with single-shot KrF excimer laser pulse. The surface roughened as the result of the laser ablation. It is further noted that single-pulse irradiation with fluence ranging from 400 to 1200 mJ/cm2gave rise to protrusion of the irradiated surface above the original surface, which is in contrast to usual expectation that irradiated surface is below the unirradiated surface. The surface protrusion is mainly attributed to the effect of surface tension. At the laser fluence of 1000 mJ/cm2, cracks were formed in the irradiated area and severe film exfoliation was observed at the periphery of the irradiated area due to the release of internal stress. With higher laser fluence above 1000 mJ/cm2, patches of film were observed to peel off within the irradiated areas. Hydrodynamic ablation is proposed to account for film exfoliation. The observed phenomenon is useful for further understanding howTiO2film reacts to strong UV laser irradiation.

Keywords: Excimer laser; titanium oxide; stress; atomic force microscopy; surface tension (search for similar items in EconPapers)
Date: 2008
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DOI: 10.1142/S0218625X08011615

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