CdSNANORODS FABRICATED BY ICP-ASSISTED MAGNETRON SPUTTERING AT ROOM TEMPERATURE

S. Y. Huang (), S. Xu, J. D. Long, J. W. Chai and Q. J. Cheng
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S. Y. Huang: Plasma Source and Application Center, NIE, Nanyang Technological University, 1 Nanyang Walk, 637616, Singapore
S. Xu: Plasma Source and Application Center, NIE, Nanyang Technological University, 1 Nanyang Walk, 637616, Singapore
J. D. Long: Plasma Source and Application Center, NIE, Nanyang Technological University, 1 Nanyang Walk, 637616, Singapore
J. W. Chai: Plasma Source and Application Center, NIE, Nanyang Technological University, 1 Nanyang Walk, 637616, Singapore
Q. J. Cheng: Plasma Source and Application Center, NIE, Nanyang Technological University, 1 Nanyang Walk, 637616, Singapore

Surface Review and Letters (SRL), 2008, vol. 15, issue 04, 515-518

Abstract: Cadmium sulfide (CdS) nanocrystals are successfully fabricated on glass and silicon substrates at room temperature with low-frequency (460 kHz) inductively coupled plasma assisted magnetron sputtering technique. Both size and shape can be controlled by changing deposition parameters and substrates. Field-emission scanning electron microscope, energy dispersive X-ray spectroscopy, and X-ray diffraction are adopted to measure the properties ofCdSnanorods.

Keywords: Nanorods; ICP-assisted magnetron; room temperature (search for similar items in EconPapers)
Date: 2008
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DOI: 10.1142/S0218625X08011676

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